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Continuous vibrating spatial particle ALD reactors were developed to achieve high powder throughput while minimizing reactor footprint. Unlike fluidized bed reactors, continuous vibrating spatial particle ALD reactors operate below fluidization, using linear vibration to convey particles through alternating regions of precursor gas. Fine powder convection in these vibrating bed reactors is still not well understood, so cohesive discrete element- method (DEM) simulations were performed to investigate the solids flow behavior. Using a Fast Fourier Transform(FFT) algorithm, we constructed a sum-of-sines model for the reactor kinematics based on accelerometer data. Accelerometer results and DEM simulations revealed the role of high-frequency excitations and need for backsliding and sticking avoidance in horizontal conveyors at low-g accelerations. From these observations, we propose a novel sawtooth excitation to enable convection of cohesive fine powders at low flow velocities. The model results were compared to data from an in-house continuous vibrating spatial particle ALD reactor. 

Aluminum nitride (AlN) is a promising material for electronic substrates and heat sinks. However, AlN powders react with water that adversely affects final part properties and necessitates processing in organic solvents, increasing the cost of AlN parts. Small quantities of yttrium oxide (Y₂O₃) are commonly added to AlN particles to enable liquid phase sintering. To mitigate the reaction of AlN particles with water, particle atomic layer deposition (ALD) was used to coat AlN powders with conformal films of Y₂O₃prior to densification and powder processing. When AlN particles were coated with 6 nm thick films of amorphous Y₂O₃, the hydrolysis reaction was significantly suppressed over 48 h, demonstrating that Y₂O₃nanofilms on AlN powders act as a barrier coating in an aqueous solution. AlN powders with Y₂O₃addition by particle ALD sintered to high relative densities (≥90% theoretical) after sintering at 1800°C for 50 min.